MEMS Technologies for High Frequency Applications
نویسنده
چکیده
In this paper, we reviewed RF MEMS research efforts in planar structures and phased arrays. For planar transceivers, we have demonstrated several RF MEMS devices in order to establish building blocks in integrated millimeterwave systems. For phased-array applications, we have demonstrated two architectures for beam forming and steering without solid-state phase shifters.
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